Design and Experiment of Sub-micron Macro-micro Drive System Based on Positioning Error Compensation

Abstract:

In order to solve the problem of high-precision positioning of traditional mechanical systems in a wide range of motion, a precision macro-micro drive system was designed, which compensated for the positioning error of the macro-drive system through the micro-drive system to realize sub-micron precision positioning. Based on the principle of flexible hinge lever and the principle of balanced additional force, a micro-amplification mechanism was designed, which can precisely amplify the input displacement according to the design amplification ratio of 1.5 without additional displacement. In the macro-micro drive system, the servo motor and ball screw was combined as the macro-drive system, and the piezoelectric ceramic actuator was used to drive the micro-amplification mechanism as the micro-drive system, which was used to compensate for the positioning error of the macro-drive system to realize the large-stroke and high-precision motion. On the basis of completing the working principle design of macro-micro drive system, the positioning error of the system was analyzed and the error compensation scheme was put forward, and the macro-micro drive system positioning error compensation experiment was completed. The experimental results showed that the average positioning error of the macro-micro drive system was reduced from 14.49μm to 0.34μm after the positioning error compensation within the range of 2mm stroke, and the average positioning error was reduced by 97.65%, which verified the validity and accuracy of the design of the macro-micro drive system and the error compensation scheme.