基于定位误差补偿的亚微米级宏微驱动系统设计与试验

Design and Experiment of Sub-micron Macro-micro Drive System Based on Positioning Error Compensation

摘要:

为解决传统机械系统在大范围运动中高精度定位问题，本文设计了一种精密宏微驱动系统，通过微驱动系统补偿宏驱动系统定位误差，实现亚微米级精密定位。基于柔性铰链杠杆原理和平衡附加力原理，设计了一种微动放大机构，可将输入位移按设计放大比1.5精密放大且无附加位移。在宏微驱动系统中，伺服电机和滚珠丝杠结合作为宏驱动系统，采用压电陶瓷制动器驱动微动放大机构作为微驱动系统，并用以补偿宏驱动系统的定位误差，实现大行程高精度运动。在完成宏微驱动系统工作原理设计的基础上，分析系统定位误差并提出误差补偿方案，开展宏微驱动系统定位误差补偿试验。试验结果显示：在运动行程2mm范围内，经过定位误差补偿后，宏微驱动系统的平均定位误差由14.49μm降低至0.34μm，平均定位误差降低97.65%。定位误差补偿试验验证了宏微驱动系统设计及误差补偿方案的有效性与精确性。

Abstract:

In order to solve the problem of high-precision positioning of traditional mechanical systems in a wide range of motion, a precision macro-micro drive system was designed, which compensated for the positioning error of the macro-drive system through the micro-drive system to realize sub-micron precision positioning. Based on the principle of flexible hinge lever and the principle of balanced additional force, a micro-amplification mechanism was designed, which can precisely amplify the input displacement according to the design amplification ratio of 1.5 without additional displacement. In the macro-micro drive system, the servo motor and ball screw was combined as the macro-drive system, and the piezoelectric ceramic actuator was used to drive the micro-amplification mechanism as the micro-drive system, which was used to compensate for the positioning error of the macro-drive system to realize the large-stroke and high-precision motion. On the basis of completing the working principle design of macro-micro drive system, the positioning error of the system was analyzed and the error compensation scheme was put forward, and the macro-micro drive system positioning error compensation experiment was completed. The experimental results showed that the average positioning error of the macro-micro drive system was reduced from 14.49μm to 0.34μm after the positioning error compensation within the range of 2mm stroke, and the average positioning error was reduced by 97.65%, which verified the validity and accuracy of the design of the macro-micro drive system and the error compensation scheme.