精密微动缩小机构设计与刚度分析

Precision Reduction Mechanism Design and Stiffness Analysis

摘要:

精密微动缩小机构能够提供较小空间内精密运动位移，可广泛应用于微电子、医疗器械和芯片封装等精密操作领域。本文基于柔性铰链杠杆原理和无附加运动原理设计一种精密微动缩小机构，该机构能够将输入位移按照2∶1精密缩小，且在运动过程中无附加力及位移。通过等效刚度法对所设计的精密微动缩小机构进行刚度分析，计算得到该机构理论刚度为75.72 N/μm；采用有限元法分析得到精密微动缩小机构刚度为74.06 N/μm；采用实验法测得到精密微动缩小机构刚度为68.86 N/μm。理论分析结果与有限元分析结果误差为2.19%，理论分析结果与实验结果误差为9.06%，分析结果验证了等效刚度法分析方法的有效性及精确性。研究结果对精密微动机构设计及刚度分析具有重要的理论参考价值。

Abstract:

Precision micromotion reduction mechanism can provide precision motion displacement in a small space, which can be widely used in microelectronics, medical devices and chip packaging and other precision operation fields. A precision micromotion reduction mechanism was designed-based on the principle of flexible hinge lever and the principle of no additional motion, which was able to reduce the input displacement according to 2∶1 precision, and there was no additional force and displacement in the process of motion. The stiffness analysis of the designed precision micromotion reduction mechanism was carried out by the equivalent stiffness method, and the theoretical stiffness of the mechanism was calculated to be 75.72 N/μm;the stiffness of the precision micromotion reduction mechanism was analyzed by the finite element method to be 74.06 N/μm;and the stiffness of the precision micromotion reduction mechanism was measured by the experimental method to be 68.86 N/μm. The error between the theoretical analysis results and finite element analysis results was 2.19%, and the error between the theoretical analysis results and experimental results was 9.06%. The analysis results verified the validity and accuracy of the analysis method of equivalent stiffness method. The results of the study had important theoretical reference value for the design and stiffness analysis of precision micromanipulation mechanism.